Comparative study on the dynamics and the composition between a pulsed laser deposition (PLD) and a plasma enhanced PLD (PE-PLD)
Date Issued
2021-05
Author(s) USM
Ruiz, Hugo
DOI
10.1016/j.rinp.2021.104066
Abstract
We report the effect of single and dual radio frequency (RF) plasma discharge on the composition and dynamics of a titanium plasma plume produced in a plasma-enhanced pulsed laser deposition (PE-PLD) system. The study was carried out in a nitrogen environ
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